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Device wafer
Diameter
3"
4"
5"
6"
Orientation
<100>
<110>
<111>
Type/Dopant
P/B
N/P
N/Sb
N/As
Resistivity
ohm.cm
Thickness
μ
Tolerance
μ
Buried Oxide
Thickness
A;
Tolerance
%;
Handle wafer
Diameter
3"
4"
5"
6"
Orientation
<100>
<110>
<111>
Type/Dopant
P/B
N/P
N/Sb
N/As
Resistivity
ohm.cm
Thickness
μ
Tolerance
μ
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