4″ SOI · 5 µm device / 0.5 µm BOX

P/B N/Sb(D) <100> · 1 – 10 Ω·cm · 500 µm handle · stock ID 188

Stock ID
188
Diameter
4″ (100 ± 0.2 mm)
Device type / dopant
P/B N/Sb(D)
Device orientation
<100>
Device thickness
5.0 ± 1.0 µm
Device resistivity
1 – 10 Ω·cm
Device finish
Polished
Buried oxide (BOX)
0.5 µm ± 5%
Handle type / dopant
P/B N/Sb(D)
Handle orientation
<100>
Handle thickness
500 ± 10 µm
Handle resistivity
1 – 10 Ω·cm
Handle finish
Polished

Compare soi wafers in stock, or use our wafer specification guide to read thickness, doping and finish values.

Listed in the soi stock list. Values are as recorded for the lot; ask us for measured data.

Layer stack

Not to scale