6″ SOI · 15 µm device / 0.2 µm BOX

P/B <100> · 0.01 – 0.02 Ω·cm · 500 µm handle · stock ID 16

Stock ID
16 (6P015-0.2-500)
Diameter
6″ (150 ± 0.2 mm)
Device type / dopant
P/B
Device orientation
<100>
Device thickness
15 ± 1.0 µm
Device resistivity
0.01 – 0.02 Ω·cm
Device finish
Polished
Buried oxide (BOX)
0.2 µm ± 5%
Handle type / dopant
P/B
Handle orientation
<100>
Handle thickness
500 ± 10 µm
Handle resistivity
0.01 – 0.02 Ω·cm
Handle finish
Polished

Compare soi wafers in stock, or use our wafer specification guide to read thickness, doping and finish values.

Listed in the soi inventory workbook. Values are as recorded for the lot; ask us for measured data.

Layer stack

Not to scale