6″ SOI · 5 µm device / 2 µm BOX

P/B <100> · 1 – 5 Ω·cm · 600 µm handle · stock ID 22

Stock ID
22 (6P05-2-600)
Diameter
6″ (150 ± 0.2 mm)
Device type / dopant
P/B
Device orientation
<100>
Device thickness
5 ± 0.5 µm
Device resistivity
1 – 5 Ω·cm
Device finish
Polished
Buried oxide (BOX)
2 µm ± 5%
Handle type / dopant
P/B
Handle orientation
<100>
Handle thickness
600 ± 10 µm
Handle resistivity
1 – 5 Ω·cm
Handle finish
Polished
Note
Notch

Compare soi wafers in stock, or use our wafer specification guide to read thickness, doping and finish values.

Listed in the soi inventory workbook. Values are as recorded for the lot; ask us for measured data.

Layer stack

Not to scale